Hydrofluoroether azeotrope is composed of a mixture of Hydrofluoroether and organic solvent, with a constant boiling point. During boiling, the proportion of each component in the liquid and gas phases remains the same and unchanged; This azeotrope has strong solubility and good compatibility, and can effectively remove fingerprints, oil, grease, and wax. It is suitable for infiltration and gas-phase cleaning of precision components such as electronic components (such as circuit boards, optical or magnetic media, and medical instruments and products (such as surgical equipment, implants, and prosthetics).